Abstract:Atomic force microscopy (AFM) tip-based nanofabrication is as a powerful method to machine nanostructures. However, the traditional AFM scratching process suffers from low processing efficiency and a low rate of material removal. Thus, an AFM tip-based nanomilling method was previously proposed to improve the machining efficiency and material removal rate; however, the machining mechanism of the nanomilling process, especially on hard-brittle silicon crystals, is not well understood. In this study, we used an AFM tip-based nanomilling approach to machine nanochannels on single-crystal silicon to investigate the machining mechanism (i.e., the material removal state, undeformed chip thickness, the brittle-to-ductile transition, and subsurface damage). For the first time, we established a theoretical model for tip-based nanomilling with a constant normal load to predict the machined depth. Nanochannels fabricated with a wide range of feed directions, crystal orientations, and tip trajectories were obtained, which provided a reference for machining high-quality nanochannels and an in-depth understanding of the nanomilling of single-crystal silicon. The experimental results demonstrated that we could machine a nanochannel without pile-ups by selecting a specific trajectory with a feed smaller than 4 nm in the 0 degrees direction, a normal load no greater than 120 mu N, and a crystal orientation at rotation angles of 135 degrees, 157.5 degrees, or 180 degrees. Moreover, transmission electron microscope analysis of the subsurface of the nanochannel revealed a large number of dislocations, stacking faults, and a layer of amorphous silicon. Our findings are of great significance for obtaining high-quality nanochannels with a predicable machined depth and understanding the nanomilling mechanism of hard-brittle materials.

Study on the Processing Outcomes of the Atomic Force Microscopy Tip-Based Nanoscratching on GaAs

Modeling and Experimental Study of Machining Outcomes when Conducting Nanoscratching Using Dual-Tip Probe on Single-Crystal Copper

Towards Understanding the Machining Mechanism of the Atomic Force Microscopy Tip-Based Nanomilling Process

Implementation of AFM Tip-Based Nanoscratching Process on Single Crystal Copper: Study of Material Removal State

Study on Material Removal for Nanochannels Fabrication Using Atomic Force Microscopy Tip-Based Nanomilling Approach

Atomic Simulations of Tip-Based Nanomilling on Single-Crystal Copper

Processing Outcomes of Atomic Force Microscope Tip-Based Nanomilling with Different Trajectories on Single-Crystal Silicon

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

Modelling and experimental study of nanoscratching process on PMMA thin-film using AFM tip-based nanomachining approach

Deformation and removal mechanism of single crystal gallium nitride in nanoscratching

Removal Of Material On Nanometer Scale During Afm Cutting

AFM tip-based mechanical nanomachining of 3D micro and nano-structures via the control of the scratching trajectory

Investigation on friction behavior and processing depth prediction of polymer in nanoscale using AFM probe-based nanoscratching method

Study on the Effects of Feed Directions on Chip Formation and Machined Depth when Implementing Nanoscratching by Nanomilling Approach

Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Molecular dynamics simulation of AFM tip-based hot scratching of nanocrystalline GaAs

Direction-identical Scratching Method for Fabricating Nanostructures Using a Modified AFM Nanoscratching System

Study on the Effects of Processing Parameters on Machining Outcomes under AFM Tip-Based Nanomilling Approach

Research on nano-scale material removal process using atomic force microscopy

Molecular Dynamics Simulation of Nanomachining Process and Mechanical Properties of Nanostructure