PROGRESSES ON MICROMACHINED FLOW SENSORS BASED ON MEMS TECHNOLOGIES
Peng Jiegang,Zhou Zhaoying,YE Xiongying
DOI: https://doi.org/10.3321/j.issn:1000-0992.2005.03.007
2005-01-01
Abstract:Flow measurement concerns an important measuring parameter in industry process and scientific research. Along with the research and rapid development of micro Electro-Mechanical sysmtes (MEMS) in recent years, the trend of development of the flow rate sensor in the traditional industry and fluid mechanics research is high integrantion level, microminiaturization, high degree of accuracy and high reliability. And, along with research and rapid development of the life sciences, comes the need of new type micromachined flow sensors in microfluid, biology, medicine, helth and food scientific research. Micromachined flow sensors have become a major focus of MEMS. This paper briefly reviews the technological development of MEMS, and introduces the principle and classification of micromachined flow sensors based on MEMS technologies. Emphases are put on the detailed summarization and evaluation of the production technology and application characteristics of micromachined flow sensors such as hotwire, heat transfer, differential pressure, lift force, fluid oscillatory. Coriolis and bionic micromachined flow sensors. A summary of calibration method of micromachined flow sensors is given in this paper. And, this paper specially covers the hot hotwire, heat transfer, differential pressure, optics micromachined flow sensors developed in China. In the end, the three stages of development of micromachined flow sensors based on MEMS technologies, the trend of the micromachined flow sensors based on MEMS technologies in future are discussed.