Multilayer Modal Method for Diffraction Gratings of Arbitrary Profile, Depth, and Permittivity

LF LI
DOI: https://doi.org/10.1364/josaa.11.001685
1994-01-01
Journal of the Optical Society of America A
Abstract:It is well known that a diffraction grating of arbitrary profile can be approximated by a stack of lamellar (rectangular groove) gratings, and that the diffraction of light by the arbitrary-profile grating can be modeled by the modal method1 that is specifically formulated to model lamellar gratings.
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