Development Of Piezoresistive Yarn Transducer Based On Mems Technology

Lb Zhao,Yl Zhao,Zd Jiang
2004-01-01
Abstract:In order to measure the linear density of the yam, a piezoresistive yam transducer has been developed by the Micro Electro-Mechanical System (MEMS) technology. When the transducer cooperates. with the self-adjustment uniformity system, which is used to control the running state of the advanced textile machinery by collecting and analyzing the transducer's output signal on line, the evenness of the yam and the textile's quality can be guaranteed. The piezoresistive yam transducer mainly consists of measuring unit and signal processing circuit unit. In order to meet the requirements of the self-adjustment uniformity system, the transducer must have high accuracy and fine dynamic characteristics. So the designs of the sensitive element and elastic element of the transducer are very important. For the sensitive element, the silicon solid-state piezoresistive chip has been manufactured with the MEMS technology and micro-fabrication technique, because the silicon material has fine mechanical and electrical performance. For the elastic beam of measuring unit, a peculiar integrative mechanical structure has been developed. From the experiment and calculating results, the developed transducer's accuracy is less than 0.2%FS and its natural frequency is equal to 8.7KHz, so it meets the requirements of the advanced textile machinery.
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