Theoretical And Experimental Analyses Of Gaussian Filtering For Ultraprecision Circular Profile

Z Xue,Jb Tan,H Zhang,Wq Zhao

2004-01-01

Abstract:By the analyses and comparisons of phase frequency characteristics, between Gaussian filter and commonly used filters for form measurements, it is proven that symmetry characteristic of Gaussian function makes the Gaussian filter overcome completely phase distortion in principle. And by the analyses and comparisons of amplitude frequency characteristics between Gaussian filtering and phase correct 2RC filtering for period signals and random signals, it is proven that the Gaussian filter having rapid filtering characteristic for the high frequencies signals and higher signal-noise-ratio for the random signals can be used to obtain the low-frequency form features more accurately and rationally, and the Gaussian filtering profile can match very well with the original circular profile. The Gaussian filtering data obtained from the Gaussian filter of our own design had been compared with the filtering data obtained from the Gaussian filter of PTB's design, the maximum difference between them is less than 3x10(-4) mum, and it is proven that the Gaussian filter has better reproducibity. The excellent amplitude frequency, phase frequency characteristics and reproducibity of the Gaussian filtering for ultraprecision circular profiles are important and helpful to standardize the filter and improved the traceability and comparison accuracy of the ultraprecision circular profile measurements.