High-efficiency Metal-insulator-Metal Electron Emitter based on Porous Alumina Film
Tao Xue,Ting Li,Xiao Wang,Kunping Guo,Guodong Wei,Chunliang Liu
DOI: https://doi.org/10.1109/led.2023.3294757
IF: 4.8157
2023-01-01
IEEE Electron Device Letters
Abstract:Vacuum nanoelectronic devices demand efficient electron emission sources, which is increasingly crucial as devices become smaller and more integrated. We propose a Rapid Thermal Treatment method for Metal-Insulator-Metal electron source insulation layers. Samples were treated at 200°C, 300°C, and 400°C in a nitrogen environment. As a result of thermal treatment, the defects in the dielectric layer decreased, and discontinuous islands emerged on the insulating layer’s surface, which increased local electron strength and decreased the electron emission threshold voltage. Consequently, the electron emission efficiency reached 23.6%.
engineering, electrical & electronic