Room-temperature extended short-wave infrared GeSn photodetectors realized by ion beam techniques
Shuyu Wen,Mohd Saif Shaikh,Oliver Steuer,Slawomir Prucnal,Jörg Grenzer,René Hübner,Marcin Turek,Krzysztof Pyszniak,Sebastian Reiter,Inga Anita Fischer,Yordan M. Georgiev,Manfred Helm,Shaoteng Wu,Jun-Wei Luo,Shengqiang Zhou,Yonder Berencén
DOI: https://doi.org/10.1063/5.0166799
IF: 4
2023-08-21
Applied Physics Letters
Abstract:GeSn alloys hold great promise as high-performance, low-cost, near- and short-wavelength infrared photodetectors with the potential to replace the relatively expensive and currently market-dominant InGaAs- and InSb-based photodetectors. In this Letter, we demonstrate room-temperature GeSn pn photodetectors fabricated by a complementary metal-oxide-semiconductor compatible process, involving Sn and P ion implantation and flash-lamp annealing prior to device fabrication. The fabrication process enables the alloying of Ge with Sn at concentrations up to 4.5% while maintaining the high-quality single-crystalline structure of the material. This allows us to create Ge0.955Sn0.045 pn photodetectors with a low dark current density of 12.8 mA/cm2 and a relatively high extended responsivity of 0.56 A/W at 1.71 μm. These results pave the way for the implementation of a cost-effective, scalable, and CMOS-compatible short-wavelength infrared detector technology.
physics, applied