Vacuum Cold Spray Technology and Its Application in Functional Devices

Ma Kai,Li Chengxin
DOI: https://doi.org/10.11933/j.issn.1007-9289.20200514001
2020-01-01
China surface engineering
Abstract:As a potential novel coating preparation process, vacuum cold spray (VCS) has attracted extensive interest from many countries' research teams. By impacting the substrate with ultrafine ceramic or metal particles at a velocity of hundreds of m/s or higher, without high-temperature sintering, the dense or porous nanostructured ceramic or metal coatings can be prepared at room temperature. VCS has the advantages of the widely available material, resistance to composition changes, direct and rapid preparation of composite materials and multiple structural coatings. Especially in the field of functional ceramics, VCS has the potential to replace traditional sinter-based production processes. In this paper, the principle and characteristics of VCS process, particle deposition behavior, and typical coating morphology are explained. The application and latest research progress of the VCS process in surface protection, biological coating, sensor applications (gas, humidity and temperature), energy devices ( solar cells, fuel cells, lithium-ion batteries and supercapacitors), micro-electromechanical systems (MEMS) devices, and metal coatings are introduced in detail. Finally, the future research direction and application fields of the VCS process are pointed out.
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