Abstract:It is important study identification method which is applied in multiple input multiple output (MIMO) motion system with flexible structures in theory and practical application. In the past MIMO motion system was usually assumed as rigid body in dynamical modeling. However, the flexible dynamics characteristics will become more and more significant, and become the important factor of limiting the system performance, with the requirements of structure design and control performance enhancing unceasingly. An identification method, which is used to identify the MIMO motion system with flexible structure, is proposed. In this method, nonparametric model is obtained through frequency domain identification experiment, and MIMO transfer function matrix with same the denominator is obtained through the general parameters orthogonal polynomial curve fitting, at last the state space model of MIMO system is obtained through the modal superposition principle of flexible structure and singular value decomposition (SVD) principle. This method has been applied at wafer stage of lithographic equipment which is a typical MIMO motion system with flexible dynamics characteristics. The final MIMO state space model has equal precision with frequency domain identification model, which validates the effectiveness of the proposed identification method. And the obtained model could satisfy the requirement of integrated control design.

Identification of MISO Systems Using Periodic Inputs and Its Application to Dual-Stage Hard Disk Drives

Multivariable Process Identification Based on Frequency Domain Measures

Two-time Scaled Identification for Multi-Energy Systems

Informative Conditions for Identification of MISO ARMAX Model in Closed-loop Systems

System Identification in Multi-Actuator Hard Disk Drives with Colored Noises using Observer/Kalman Filter Identification (OKID) Framework

Subspace Model Identification for Industrial Processes

Least-squares Based Iterative Parameter Estimation for Two-Input Multirate Sampled-Data Systems

System Identification Using Slow and Irregular Output Samples

Distributed Identification Of Large-Scale Miso Output-Error Systems

Identification for a Kind of Disturbed Multi-Dimensional Wiener System

Combined Invariant Subspace \& Frequency-Domain Subspace Method for Identification of Discrete-Time MIMO Linear Systems

Identification-based Sensor and Actuator Fault Diagnosis for Industrial Control Systems and Its Application to HTR-PM

Identification of Multiple Input Multiple Output Motion System with Flexible Structures

Frequency Domain Identification of Multi-Input, Multi-Output Systems Considering Physical Relationships Between Measured Variables

Fundamental Identification Limit on Diagonal Canonical Form for SISO Systems.

Fundamental Identification Limit of Single-Input and Single-Output Linear Time-Invariant Systems.

A Parallel Speed and Rotor Time Constant Identification Scheme for Indirect Field Oriented Induction Motor Drives

A Two-Stage Method for Identification of Dual-Rate Systems with Fast Input and Very Slow Output

Modeling and Model Identification of Micro-position-control Hydraulic System

System Identification of Miso Second-Order System Based on Least Square Method

EFFECTIVE DECENTRALIZED TITO PROCESS IDENTIFICATION FROM CLOSED-LOOP STEP RESPONSES