General synthesis of two-dimensional van der Waals heterostructure arrays
Jia Li,Xiangdong Yang,Yang Liu,Bolong Huang,Ruixia Wu,Zhengwei Zhang,Bei Zhao,Huifang Ma,Weiqi Dang,Zheng Wei,Kai Wang,Zhaoyang Lin,Xingxu Yan,Mingzi Sun,Bo Li,Xiaoqing Pan,Jun Luo,Guangyu Zhang,Yuan Liu,Yu Huang,Xidong Duan,Xiangfeng Duan
DOI: https://doi.org/10.1038/s41586-020-2098-y
IF: 64.8
2020-03-11
Nature
Abstract:Two-dimensional van der Waals heterostructures (vdWHs) have attracted considerable interest<sup><a href="#ref-CR1">1</a>,<a href="#ref-CR2">2</a>,<a href="#ref-CR3">3</a>,<a href="/articles/s41586-020-2098-y#ref-CR4">4</a></sup>. However, most vdWHs reported so far are created by an arduous micromechanical exfoliation and manual restacking process<sup><a href="/articles/s41586-020-2098-y#ref-CR5">5</a></sup>, which—although versatile for proof-of-concept demonstrations<sup><a href="#ref-CR6">6</a>,<a href="#ref-CR7">7</a>,<a href="#ref-CR8">8</a>,<a href="#ref-CR9">9</a>,<a href="#ref-CR10">10</a>,<a href="#ref-CR11">11</a>,<a href="#ref-CR12">12</a>,<a href="#ref-CR13">13</a>,<a href="#ref-CR14">14</a>,<a href="#ref-CR15">15</a>,<a href="/articles/s41586-020-2098-y#ref-CR16">16</a></sup> and fundamental studies<sup><a href="#ref-CR17">17</a>,<a href="#ref-CR18">18</a>,<a href="#ref-CR19">19</a>,<a href="#ref-CR20">20</a>,<a href="#ref-CR21">21</a>,<a href="#ref-CR22">22</a>,<a href="#ref-CR23">23</a>,<a href="#ref-CR24">24</a>,<a href="#ref-CR25">25</a>,<a href="#ref-CR26">26</a>,<a href="#ref-CR27">27</a>,<a href="#ref-CR28">28</a>,<a href="#ref-CR29">29</a>,<a href="/articles/s41586-020-2098-y#ref-CR30">30</a></sup>—is clearly not scalable for practical technologies. Here we report a general synthetic strategy for two-dimensional vdWH arrays between metallic transition-metal dichalcogenides (m-TMDs) and semiconducting TMDs (s-TMDs). By selectively patterning nucleation sites on monolayer or bilayer s-TMDs, we precisely control the nucleation and growth of diverse m-TMDs with designable periodic arrangements and tunable lateral dimensions at the predesignated spatial locations, producing a series of vdWH arrays, including VSe<sub>2</sub>/WSe<sub>2</sub>, NiTe<sub>2</sub>/WSe<sub>2</sub>, CoTe<sub>2</sub>/WSe<sub>2</sub>, NbTe<sub>2</sub>/WSe<sub>2</sub>, VS<sub>2</sub>/WSe<sub>2</sub>, VSe<sub>2</sub>/MoS<sub>2</sub> and VSe<sub>2</sub>/WS<sub>2</sub>. Systematic scanning transmission electron microscopy studies reveal nearly ideal vdW interfaces with widely tunable moiré superlattices. With the atomically clean vdW interface, we further show that the m-TMDs function as highly reliable synthetic vdW contacts for the underlying WSe<sub>2</sub> with excellent device performance and yield, delivering a high ON-current density of up to 900 microamperes per micrometre in bilayer WSe<sub>2</sub> transistors. This general synthesis of diverse two-dimensional vdWH arrays provides a versatile material platform for exploring exotic physics and promises a scalable pathway to high-performance devices.
multidisciplinary sciences