Mid-infrared ChG-on-MgF2 Waveguide Gas Sensor Based on Wavelength Modulation Spectroscopy.

Mingquan Pi,Chuantao Zheng,Huan Zhao,Zihang Peng,Jiaming Lang,Jialin Ji,Lei Liang,Yu Zhang,Yiding Wang,Frank K. Tittel
DOI: https://doi.org/10.1364/ol.440361
IF: 3.6
2021-01-01
Optics Letters
Abstract:A novel, to the best of our knowledge, mid-infrared chalcogenide (ChG) on magnesium fluoride ( M g F 2 ) waveguide gas sensor was fabricated by using the lift-off method. M g F 2 was used as a lower cladding layer to increase the external confinement factor for enhancing light–gas interaction. Wavelength modulation spectroscopy (WMS) was used in carbon dioxide ( C O 2 ) detection at the wavelength of 4319 nm ( 2315.2 c m − 1 ). The limit of detection for the 1-cm-long sensing waveguide based on WMS is ∼ 0.3 % , which is > 8 times lower than the same sensor using direct absorption spectroscopy (DAS). The combination of WMS with the waveguide gas sensor provides a new measurement scheme for the performance improvement of on-chip gas detection.
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