The Absorption Enhancement Effect of Metal Gratings Integrated Silicon-based Blocked-Impurity-Band (BIB) Terahertz Detectors

Yulu Chen,Wulin Tong,Bingbing Wang,Lin Wang,Huiyuan Cui,Xiaodong Wang
DOI: https://doi.org/10.1109/nusod52207.2021.9541474
2021-01-01
Abstract:High-sensitivity Terahertz (THz) detection technology is widely researched for its potential applications in astronomical observation, human security check, weak signal biomacromolecule detection, etc. In this work, a novel THz detector based on metal gratings/Si-BIB hybrid structure is theoretically simulated and successfully fabricated. From FDTD simulation results, the optical field is localized in the absorbing-layer region due to the waveguide resonance effect of metal gratings with 7μm period, 5μm depth and 2/7 duty ratio. Then, the experimental results show that its spectral response is 223% higher than that of the device without metal gratings at the peak wavelength of 17μm. Our work successfully proposed a practical hybrid structure device for the biomacromolecule detection application as well as the weak signal detection in other THz applications.
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