Integrated magnetic elasticity sensor

Zhimin Zhou,Yong Zhou,Chong Lei,Lei Chen,Wen Ding
2011-01-01
Abstract:The invention relates to an integrated magnetic elasticity sensor, belonging to the technical field of micro electro mechanical systems. The integrated magnetic elasticity sensor comprises a glass substrate, a magnetic field excitation offset coil, a signal reception coil, a sensor support, a magnetic belt material and insulation material layers. The magnetic field excitation offset coil is located on the glass substrate; the signal reception coil is located above the magnetic field excitation offset coil; the sensor support is located above the signal reception coil; the insulation material layers are respectively located among the magnetic field excitation offset coil, the signal reception coil and the sensor support; and both ends of the magnetic belt material are fixed on the sensor support. The invention has the advantages of high processing precision and small size of the device, can eliminate background signals of the excitation signal in the reception coil by adopting an 8-shaped collection coil, realizes real-time monitoring of vibration signals and can realize the portable characteristic.
What problem does this paper attempt to address?