The Realization Of Zroxny Temperature Sensors With Good Sensitivity And Stability In The Temperature Range Above 150k

Yanjie Li,Minmin You,Xun Gong,Xiu-Yan Li,Zude Lin,Jingquan Liu
DOI: https://doi.org/10.1109/NEMS51815.2021.9451523
2021-01-01
Abstract:In this work, the temperature range of ZrOxNy temperature sensors with high sensitivity is increased to 150 K similar to 300 K for the first time. It was achieved by controlling the thickness of ZrOxNy thin films to 34 nm. In addition, we give an in-depth investigation of the stability of these temperature sensors utilizing three temperature shock methods. It was demonstrated that the method with the longest stabilization time could improve the stability to the greatest extent. We have achieved ZrOxNy thin films temperature sensors with good sensitivity and stability of 4.53 mK standard deviation under the measurement of water triple point. This work provides an instructive guide for developing temperature sensors with high performance.
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