Abstract:Flexible humidity sensors with high sensitivity, fast response time, and outstanding reliability have the potential to revolutionize electronic skin, healthcare, and non-contact sensing. In this study, we employed a straightforward nanocluster deposition technique to fabricate a resistive humidity sensor on a flexible substrate, using molybdenum oxide nanoparticles (MoO x NPs). We systematically evaluated the humidity-sensing behaviors of the MoO x NP film-based sensor and found that it exhibited exceptional sensing capabilities. Specifically, the sensor demonstrated high sensitivity (18.2 near zero humidity), a fast response/recovery time (1.7/2.2 s), and a wide relative humidity (RH) detection range (0–95%). The MoO x NP film, with its closely spaced granular nanostructure and high NP packing density, exhibited insensitivity to mechanical deformation, small hysteresis, good repeatability, and excellent stability. We also observed that the device exhibited distinct sensing kinetics in the range of high and low RH. Specifically, for RH > 43%, the response time showed a linear prolongation with increased RH. This behavior was attributed to two factors: the higher physical adsorption energy of H2O molecules and a multilayer physical adsorption process. In terms of applications, our sensor can be easily attached to a mask and has the potential to monitor human respiration owing to its high sensing performance. Additionally, the sensor was capable of dynamically tracking RH changes surrounding human skin, enabling a non-contact sensing capability. More significantly, we tested an integrated sensor array for its ability to detect moisture distribution in the external environment, demonstrating the potential of our sensor for contactless human–machine interaction. We believe that this innovation is particularly valuable during the COVID-19 epidemic, where cross-infection may be averted by the extensive use of contactless sensing. Overall, our findings demonstrate the tremendous potential of MoO x NP-based humidity sensors for a variety of applications, including healthcare, electronic skin, and non-contact sensing.

Noncontact Sensing: Flexible Noncontact Sensing for Human–Machine Interaction (adv. Mater. 16/2021)

Flexible Noncontact Sensing for Human–Machine Interaction

Sodium Alginate/MXene-Based Flexible Humidity Sensors with High-Humidity Durability and Application Potentials in Breath Monitoring and Non-Contact Human–Machine Interfaces

Single-sided and Integrated Polyaniline/ Poly(vinylidene Fluoride) Flexible Membrane with Micro/nanostructures As Breathable, Nontoxic and Fast Response Wearable Humidity Sensor.

Flexible Smart Noncontact Control Systems with Ultrasensitive Humidity Sensors

An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning

Sensors: Flexible and Stretchable 3ω Sensors for Thermal Characterization of Human Skin (Adv. Funct. Mater. 26/2017)

Laser-direct-writing assisted preparation of flexible humidity sensors based on semi-interpenetrating polymer network for applications in non-contact human-machine interaction

High‐performance Flexible Humidity Sensors for Breath Detection and Non‐touch Switches

High-Performance Flexible Humidity Sensor Based on MoO x Nanoparticle Films for Monitoring Human Respiration and Non-Contact Sensing

Portable Wireless Humidity Sensor Based on Hyperbranched Polysiloxane for Multifunctional Non-Contact Sensing

A Flexible Temperature Sensor for Noncontact Human-Machine Interaction

Non-contact porous composite fiber paper-based humidity sensor for wearable breathing and skin humidity monitoring

Multiscale and hierarchical wrinkle enhanced graphene/Ecoflex sensors integrated with human-machine interfaces and cloud-platform

Superhydrophilic, Underwater Superoleophobic, and Highly Stretchable Humidity and Chemical Vapor Sensors for Human Breath Detection.

Optical Microfibers for Sensing Proximity and Contact in Human–Machine Interfaces

High Sensitivity and Broad Detection Range Flexible Capacitive Pressure Sensor Based on Rgo Cotton Fiber for Human Motion Detection

High Performance Humidity Fluctuation Sensor for Wearable Devices Via a Bioinspired Atomic-Precise Tunable Graphene-Polymer Heterogeneous Sensing Junction

Fast-Response Non-Contact Flexible Humidity Sensor Based on Direct-Writing Printing for Respiration Monitoring

Integrating Ti 3 C 2 T x MXene Nanosheets with Thermoplastic Polyurethane Nanofibers as Wearable Humidity Sensors for Noninvasive Sleep Monitoring and Noncontact Sensing