Edge Determination Improvement of Scanning Electron Microscope Images by Inpainting and Anisotropic Diffusion for Measurement and Analysis of Microstructures

Shuiquan Pang,Xianmin Zhang,Hai Li,Yihua Lu
DOI: https://doi.org/10.1016/j.measurement.2021.109217
IF: 5.6
2021-01-01
Measurement
Abstract:Edge determination is crucial in vision-based measurement and analysis of microstructures. A method for improving the edge determination of actual scanning electron microscope (SEM) images for analyzing and measuring microstructures is proposed. In this method, to solve the difficulties in edge determination caused by the possible edge blooming and noise during SEM imaging, inpainting and adaptive anisotropic diffusion strategies are developed. A series of simulations and experiments are conducted to evaluate the performance of the proposed method. The results show that the proposed method can effectively reduce the edge blooming and noise effects, thereby improving the robustness and accuracy of edge determination. Finally, applications of the proposed method in measurement of microstructures with known dimensions are demonstrated.
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