Abstract:Nanoscale preconfinement of DNA has been shown to reduce the variation of passage times through solid-state nanopores. Preconfinement has been previously achieved by forming a femtoliter-sized cavity capped with a highly porous layer of nanoporous silicon nitride (NPN). This cavity was formed by sealing a NPN nanofilter membrane against a substrate chip using water vapor delamination. Ultimately, this method of fabrication cannot keep a consistent spacing between the filter and solid-state nanopore due to thermal fluctuations and wrinkles in the membrane, nor can it be fabricated on thousands of individual devices reliably. To overcome these issues, we present a method to fabricate the femtoliter cavity monolithically, using a selective XeF2 etch to hollow out a polysilicon spacer sandwiched between silicon nitride layers. These monolithically fabricated cavities behave identically to their counterparts formed by vapor delamination, exhibiting similar translocation passage time variation reduction and folding suppression of DNA without requiring extensive manual assembly. The ability to form nanocavity sensors with nanometer-scale precision and to reliably manufacture them at scale using batch wafer processing techniques will find numerous applications, including motion control of polymers for single-molecule detection applications, filtering of dirty samples prior to nanopore detection, and simple fabrication of single-molecule nanobioreactors.

Experimental Research on Fabrication of Silicon Nitride Film Nanopore Device

Double Layer Nanopore Fabricated By Fib And Tem

Fabrication of Si3 N4 nanopore for DNA detection

Research Progress of Solid-State Nanopores for the New DNA Detection Method

Wafer-lever Au Nanogap-Nanopore Fabricated by NEMS Technology

Monolithic Fabrication of NPN/SiNx Dual Membrane Cavity for Nanopore-based DNA Sensing

Development of Solid-State Nanopore Fabrication Technologies

Fabrication of Silicon Nanopore Arrays Using A Combination of Dry and Wet Etching

Fabrication and Applications of Solid-State Nanopores

Fabrication of Nanopores for Biomacromolecule Detection

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Sub-20 nm Nanopores Sculptured by a Single Nanosecond Laser Pulse

A novel method to fabricate silicon nanopore arrays

Fabrication and Characterization of Nanopore Array

(Keynote) Solid-State Nanopore Fabrication with Conventional Process

Photothermally Assisted Thinning of Silicon Nitride Membranes for Ultrathin Asymmetric Nanopores.

Structure Design of Silicon Based Nanopore Chips for Noise Reduction

DNA-functionalized silicon nitride nanopores for sequence-specific recognition of DNA biosensor

Fabrication of Silicon Nanopore Arrays with Three-Step Wet Etching

Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope.

DIRECT FORMATION OF NANOPORE ARRAY VIA FOCUSED ION BEAM FINE MILLING AND SURFACE COATING TECHNIQUES