AN ANALYSIS ON CHARACTERISTIC OF MAGNETOELASTICITY OF A MAGNET FIELD MICROSENSOR MADE OF CANTILEVERED PLATES WITH FERROMAGNETIC FILMS

Youhe Zhou,Qinshu He,Xiaojing Zheng
DOI: https://doi.org/10.3969/j.issn.0254-7805.2000.04.001
2000-01-01
Acta Mechanica Solida Sinica
Abstract:The purpose of this paper is to study the magneto-mechanical characteristic of a microsensor which is composed of a cantilevered beam plate with ferromagnetic films in order to measure magnetic fields from the deformation of plate when the microsensor is located in the magnetic fields. To this end, a numerical approach combined by the finite element method for magnetic fields and the finite difference method for deflection of the microsensor is proposed to analyze quantitatively the deflection under magnetoelastic interaction. After that, some quantitative results of a case study for the magnetoelastic characteristic between magnetic fields and deflection of the microsensor in the magnetic fields are given in details. The results show that this microsensor is not only used to measure the magnitude of magnetic intensity, but also applied possibly to monitor the direction of vector of the magnetic field.
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