Abstract:Based on the solid immersion lenses (SILs) ,a new super-resolution system with nan-ometer scale was designed by using the SU-8 photoresist and a 4 .87 μm diameter spherical lens .The computation process of the magnification was introduced .The focal distance was simulated by softwares in addition .By changing the thickness of the SU-8 layer from 3 .4μm to 0 ,the system's magnification was changed from 1 .6x to 2 .6x .Experiment results show that the thickness of SU-8 photoresist influences the magnification directly ,the stripe patterns of the blu-ray disc can be observed in ordinary optical microscopes by using the super-resolution system .

Fabrication of removable superlens and research of its characteristics