Method of undetermined coefficients for deriving the error-compensating algorithms in phase shifting interferometry

钱克矛,伍小平
DOI: https://doi.org/10.3969/j.issn.0254-7805.2001.03.016
IF: 0.6
2001-01-01
ACTA PHOTONICA SINICA
Abstract:A group of phase shifting algorithms is derived by the method of undeterminedcoefficients (UCM).The unknown coefficients are set in a general algorithm expression,and then solved by adding bonding equations according to error compensation requirements.Thus the algorithm design and error alalysis are carried out simultaneously.Phase shifting algorithms derived by this method are insensitive to one or more error sources which are considered in algorithm design.
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