Electromagnetic radiation and inhibition of electric excitation excimer laser systems

Duliang ZHAO,Xu LIANG,Xiaodong FANG
DOI: https://doi.org/10.7510/jgjs.issn.1001-3806.2017.04.005
2017-01-01
Abstract:In order to prevent the strong electromagnetic interference produced by an electric excitation excimer laser system, the electromagnetic radiation mechanism of excimer laser was analyzed according to the principle of electromagnetic radiation and the main radiation sources were determined, i.e., the main discharge circuit, the light outlet and hydrogen thyratron.The key parts were tested by using a near-field probe respectively.Electromagnetic shielding design was implemented and shielding effectiveness was tested by combining the test results with the principle of electromagnetic shielding.And then, other several measures was also put forward to restrain electromagnetic interference in view of the excimer laser system.The results show that the effectiveness of the shielding box can reach 40dB and the excimer laser system is stable and reliable after the introduction of electromagnetic interference suppression measures.This study satisfies the practical requirement in engineering.
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