Temperature Control System of Semiconductor Device and Application for Infrared Gas Detection
Yan Wan-hong,Zhou Yan-wen,Yu Di,Liu Zhi-wei,Song Fang,Zheng Chuan-tao,Wang Yi-ding
DOI: https://doi.org/10.3788/gzxb20194803.0312002
IF: 0.6
2019-01-01
ACTA PHOTONICA SINICA
Abstract:A temperature control system for semiconductor devices is developed, which can be used for the temperature control of semiconductor devices with built-in thermoelectric cooler and of those without thermoelectric cooler and thermistor over a wide variation range of ambient temperature. The hardware part of the system is mainly composed of two parts. For the first part, a main controller module, a temperature acquisition module and a thermoelectric cooler current control module realize the temperature control of the semiconductor devices with built-in thermoelectric cooler. For the second part, an auxiliary controller module, a temperature acquisition module, a metal-oxide-semiconductor field- effect transistor switch circuit module and a thermoelectric cooler realize the temperature control of the semiconductor devices without built-in thermoelectric cooler. For the software, the real-time acquisition of the operating temperature of the semiconductor device is realized by the main and auxiliary controllers, and an integral-limited digital proportional-integral-derivative algorithm is used to adjust the current of the thermoelectric cooler driver to achieve a constant temperature control. Using the developed temperature control system, the temperature control accuracy of a semiconductor laser with a built-in TEC is +/- 0.01 degrees C, and the temperature stability reaches 0.004 8 degrees C. The temperature control experimental results of a semiconductor source without thermoelectric cooler show that the temperature control accuracy are +/- 0.05 degrees C, +/- 0.01 degrees C, +/- 0.02 degrees C at an ambient temperature of 18 degrees C, room temperature and 40 degrees C, respectively. The output spectrum of a 1.563 mu m laser is measured continuously for 5 hours by the developed temperature controller, which generates a stable peak wavelength. With a 1.653 mu m laser, methane detection experiments are carried out by using a temperature controller and the developed controller. A lower detection limit is achieved by the developed controller as compared with the results obtained by the commercial one. The system has the advantages of small size, low cost, easy integration, stable and reliable operation, and has good application prospects in infrared gas detection.