Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating

QIAO Jing,XIE Sheng,MAO Lu-hong,CONG Jia,DONG Wei-feng
DOI: https://doi.org/10.3788/fgxb20183903.0363
2018-01-01
Abstract:To meet the requirement of high responsivity of silicon-based photodetector in visible light communication (VLC),a novel silicon-based metal-semiconductor-metal photodetector utilizing the abnormal optical transmission of subwavelength metal grating was proposed. The effects of grating height,grating period and slit width on the absorptive performance of the photodetector were ana-lyzed in detail by using the method of finite difference time domain. The simulation results indicate that the absorption enhancement was improved by the Fabry-Perot resonance and the surface plasmon polariton. For the VLC system with a wavelength of 615 nm, the optimum period, the optimum height and the optimum slit width of the metal grating are 580,91,360 nm,respectively. The ab-sorption efficiency of the designed detector was 32% higher than that of the detector without metal grating. Since the proposed photodetector is based on standard CMOS process,it has potential appli-cation in the visible light communication.
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