Study on diagnosis of pulsed laser induced photo-detachment technique for capacitively coupled negative O2 plasma

Tao WANG,Jun WANG,Cheng-shuang TANG,Yu YANG,Yu XIN

DOI: https://doi.org/10.16568/j.0254-6086.201701007

2017-01-01

Abstract:A high energy pulsed laser beam with wavelength of 532nm was applied to irradiate the capacitively coupled O2 plasma driven by 40.68MHz. Spatial potential of the plasma and electro negativity are diagnosed by exerting a certain positive bias on the probe aligned with laser beam at the center. The experimental results show that a transition of signal wave shape on the probe occurs from V-shaped to invert U-shaped as increasing positive bias. The transition voltage point is just the spatial potential of electronegative plasma. An empirical method was given to obtain the spatial potential of negative plasma by using LIPD technique. Additionally, plasma electro negativity keeps a constant basically as increasing positive bias beyond the plasma spatial potential. The experiments still show a trend of decrease in electro negativity of O2 plasma with increasing RF input power.