The principle and applications of high-resolution scanning electron microscopy

Zhi-Hong JIA,Li-Peng DING,Hou-Wen Chen
DOI: https://doi.org/10.7693/wl20150704
2015-01-01
Physics
Abstract:Scanning transmission electron microscopy (STEM) is currently one of the most widely used methods for microscopic imaging, due to its advantages of improved resolution, high compositional sensitivity, and directly interpretable images. High-resolution STEM can directly ob-tain atomic resolution Z-contrast images, and also analyze the atomic and electronic structure of ma-terials on a sub-angstrom scale in combination with X-ray energy-dispersive spectrometry (EDS) and electron energy loss spectrometry (EELS). The fundamental concept and applications of STEM are briefly introduced, and the principle, characteristics and applications of high angle annular dark field and annular bright field imaging are described. The characteristics and applications of EDS and EELS are also briefly described.
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