Abstract:Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

In-situ TEM construction of tunable carbon nanotube resonators

Tuning the Resonance Properties of 2D Carbon Nanotube Networks Towards a Mechanical Resonator

Transversally and axially tunable carbon nanotube resonators in situ fabricated and studied inside a scanning electron microscope.

Reversible Tuning of Individual Carbon Nanotube Mechanical Properties Via Defect Engineering

Resonant Modelling of Two Types of Tunable Carbon Nanotube Electromechanical Oscillators

Stressed Carbon Nanotube Devices for High Tunability, High Quality Factor, Single Mode GHz Resonators

Ultrahigh frequency longitudinal oscillators from single-walled carbon nanotubes

Tunable Mechanical and Electrical Properties of Coaxial BN‐C Nanotubes

Tunable Micro- and Nanomechanical Resonators

Tuning Nanotubes: Beam to String Transition of Vibrating Carbon Nanotubes under Axial Tension (adv. Funct. Mater. 11/2009)

Tuning Semiconducting Properties Of Single Carbon Nanotube For Fabrication Of Nano Devices

Effect of the Chemisorbed Molecular Structure on the Frequency of Carbon Nanotube Resonators: Molecular Dynamics Simulations.

Beam to String Transition of Vibrating Carbon Nanotubes Under Axial Tension

The Size Effect on the Voltage-Dependent Frequency of Fixed-Fixed Carbon Nanotubes Resonator

Tuning Threshold Voltage of Carbon Nanotube Thin Film Transistors by Channel Length Engineering

Tip-Enhanced Raman Spectroscopic Imaging of Individual Carbon Nanotubes with Subnanometer Resolution

Controlled Growth of a Single Carbon Nanotube on an AFM Probe

Active Frequency Tuning of the Cantilever Nanoresonator Utilizing a Phase Transformation of NiTi Thin Film

Oscillation control of carbon nanotube mechanical resonator by electrostatic interaction induced retardation

Carbon nanotubes as ultra-high quality factor mechanical resonators

Fabrication and configuration of carbon nanotube probes in atomic force microscopy