The Modeling of a Two Dimensional Servo System for Precise Positioning Mechanism

LI Ruo-yu,TAN Yong-hong,LEI Xing-hua,XIE Yang-qiu
DOI: https://doi.org/10.3969/j.issn.1673-808x.2005.03.013
2005-01-01
Abstract:Abstrcat In this paper, according to the design requirement of the precise stage, the transfer function of a two dimensional precise positioning mechanism is analyzed. A simplified friction model is obtained at first. Based on the friction compensation, the model of frequency response and the z transfer function are estimated by using spectral analysis and least square estimation algorithm respectively. The experimental results illustrate the effectiveness of the identified models of the servo system, thus lay a solid foundation for the design of the control system of the precise positioning mechanism.
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