Ultra-Thick Multilayer Ti-Doped Dlc Films Deposited By Double Bend-Tube Magnetic Filter Cathode Vacuum Arc Technology

Jiang Qi-Li,Wang Hao-Qi,Zhou Han,Pang Pan,Liu Jian-Wu,Liao Bin
DOI: https://doi.org/10.11933/j.issn.1007-9289.20171201002
2018-01-01
China surface engineering
Abstract:Extreme operating conditions have high requirement for the performance of key component's coatings. As a common coating, thin diamond-like carbon (DLC) films cannot meet the increasing performance requirements due to the limited thickness. Therefore, developing preparation technology of ultra-thick DLC films has practical significance in researching. Multilayer Ti-doped DLC films were prepared by the deposition technology of double bend-tube magnetic filter cathode vacuum arc. Vickers hardness tester, friction and wear tester, FESEM, EDS, TEM, XPS, XRD and Raman spectrometer were selected to analyze the structures and properties of the films. The results show that the highest deposition rate can reach up to 0.40 mu m/min. With increasing acetylene (C2H2) flow rate during the deposition, the relative content of super-hard TiC phase in the Ti-doped DLC films decreases, which is responsible for the decrease of the hardness and the worse thermal stability. The DLC films with low internal stress can be effectively prepared by metal doping and multilayer composite structure, and the preparation of ultra-thick DLC film (up to 42.3 mu m) is achieved at the same time.
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