Experimental Study of the Spectrum at 11~20 Nm of a Laser-Produced Plasma Source Using Water Target

QI Li-hong,LI Zhong-fang,NI Qi-liang,CHEN Bo

DOI: https://doi.org/10.3321/j.issn:1004-924x.2005.03.005

2005-01-01

Optics and Precision Engineering

Abstract:A laser- produced plasma(LPP) source is built with water as target and a Nd:YAG laser as irradiate laser, the radiation of the LPP source at 11~20 nm is measured with an AXUV100 silicon photodiode combined with a McPHERSON model 247 grazing incidence monochromator, of which the monochromator resolution is Δλ≤0.075 nm, and the wavelength scanning interval is 0.5 nm. The experimental result demonstrates that the water target LPP source has EUV emission at 11~20 nm wavelength, which are all generated from electronic transitions in oxygen ions. In addition, to solve the erosion problem caused by the short distance between the laser-water action point and the nozzle, the distance is lengthened by heating the nozzle to reduce the effect caused by the evaporation and the adiabatic expansion.