Characteristics of magnetron discharge in short vacuum gap

Shangmao HU,Xueling YAO,Jingliang CHEN
DOI: https://doi.org/10.3969/j.issn.1003-3076.2015.08.008
2015-01-01
Abstract:The existing vacuum meter based on Penning magnetron discharging needs vacuum gap greater than 10mm. An experiment is carried on the ionic current characteristics of magnetron discharge in a short gap of 1-7mm. Experimental results show that, the ionic current waveform is a trapezoidal wave at 10 -4 Pa rather than a square wave and the ionic current wave shifts from a trapezoidal to a square wave with the pressure increasing. The ionic peak current is only affected by electric field and the ionic current pulse width is only affected by magnetic fields, so that the ionic current charge is affected both by the electric and magnetic fields. The ionic peak current decreases with the vacuum gap increasing between 1mm and 7mm, and the decreasing rate is of 5%, but it changes relatively small in the ionic current charge. Lastly, it presents an exponential function between the changes of vacu?um pressure and ionic peak current and charge.
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