Design of 915 MHz TE10-TE01 mode Convertor

Jian DONG,Fu-kun LIU,Lian-min ZHAO,Xin-sheng YAN,Wei-ye XU,Yun-ying TANG
DOI: https://doi.org/10.3969/j.issn.0258-0934.2017.01.009
2017-01-01
Abstract:In this paper,we design a mode converter that can convert the TE10 rectangular waveguide mode into TE01 circular waveguide mode.It is used in the thin film deposition in electron cyclotron resonance (ECR) technology,so the microwave power will keep a particular pattern distribution in the reaction chamber and work together with the magnetic field to produce plasma.The magnetron center frequency of output power is 915 MHz.In order to avoid the motivation of the spurious modes,improve the conversion efficiency and keep the bandwidth unchanged,we use HFSS to optimize the structure.The resulted conversion efficiency is about 99.90% at 915 MHz.The conversion efficiency is bigger than 99.00% within the scope of the center frequency of 20 MHz,it satisfies with the requirements.
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