Microelectronic Processing Techniques for Microarrays in Genechips

Zhi-wen YU,Jun YU,Jing-ping XU,Wen-li ZHOU
DOI: https://doi.org/10.3969/j.issn.1004-3365.2001.02.007
2001-01-01
Abstract:Genechip, which adopts microelectronic process technology and gene molecule's self-assembly technique to generate thousands of different DNA microarrays in a microchip, can make large-scale identification of lifeinformation based on gene. Microelectronic technologies for IC's, such as oxidation, photolithography, evaporation and sputtering, are investigated for fabrication of DNA microarrays propitious to electrochemical detection and analyzing. And the manufacturing scheme of the microfluidic circuit based on golden electrode is proposed.
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