Study on the Influence of Substance Temperature on the Defect and Optical Performance of Single YbF3 Films
Yao-ping ZHANG,Yun-dong ZHANG,Ning LING,Hong XU
DOI: https://doi.org/10.3969/j.issn.1005-5630.2006.01.020
2006-01-01
Abstract:A series of single YbF_3 films were prepared by evaporation.The microstructure defects on film surfaces and the effect of deposition temperature on it were investigated.The rms surface roughness was measured.It was shown that the film surface defect density could decreased by applying deposition temperature.
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