Derivative Method for Dual-Wavelength Three-Frame Phase-Shifting Interferometry

Yuanyuan Xu,Yu Liang,Yang Zou,Qibao Shen,Shuangshuang Xue,Yawei Wang,Shining Zhu
DOI: https://doi.org/10.1016/j.ijleo.2020.165953
IF: 3.1
2020-01-01
Optik
Abstract:Dual-wavelength interferometry is an important technique, which is widely used in optical measurement and microscopy imaging. In this study, a phase extraction method using derivative algorithm for simultaneous dual-wavelength three-frame phase-shifting interferometry is proposed. Only by calculating the difference between the first and other interferograms as well as its first-order and second-order derivatives, one can separate the information of single-wavelength and obtain continuous phase of the synthetic wavelength. The phase shift can be any value between (0,2π). Simulation and experimental results demonstrate that this method can be used to dual-wavelength on-axis and off-axis interferometric imaging systems with high accuracy. Since only three phase-shifted interferograms are required and only partial derivative algorithm is used, the imaging speed is faster.
What problem does this paper attempt to address?