Non-Destructive Rapid Inspection Methods for Spatial Light Modulator Using Swept Source Optical Coherence Tomography

Pingping Jia,Hong Zhao,Yuwei Qin,Meiqi Fang,Xiaopeng Guo
DOI: https://doi.org/10.1117/12.2512097
2019-01-01
Abstract:A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15 mu m and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.
What problem does this paper attempt to address?