Atomic Hydrogen Determination in Medium-Pressure Microwave Discharge Hydrogen Plasmas Via Emission Actinometry

Zc Geng,Y Xu,Xf Yang,Wg Wang,Am Zhu

DOI: https://doi.org/10.1088/0963-0252/14/1/010

2005-01-01

Abstract:Atomic hydrogen plays an important role in the chemical vapour deposition of functional materials, plasma etching and new approaches to the chemical synthesis of hydrogen-containing compounds. This work reports experimental determinations of atornic hydrogen in microwave discharge hydrogen plasmas formed from the TM01 microwave mode in an ASTeX-type reactor, via optical emission spectroscopy using Ar as an actinometer. The relative intensities of the H atom Balmer lines and Ar-750.4 nm emissions as functions of input power and gas pressure have been investigated. At an input microwave power density of 13.5 W cm(-3), the approximate hydrogen dissociation fractions calculated from electron-impact excitation and quenching cross sections in the literature, decreased from similar to 0.08 to similar to 0.03 as the gas pressure was increased from 5 to 25 Torr. The influences of the above cross sections, and the electron and gas temperatures of the plasmas on the determination of the hydrogen dissociation fraction data have been discussed.