Abstract:It is known that in very-high-frequency capacitively coupled plasmas (VHF CCPs), the higher harmonics generated by nonlinear sheath motion can enhance the standing wave effect (SWE), which can lead to center-peaked plasma density profiles. In this work, an improved nonlinear electromagnetic model incorporating a transmission line model, an electron momentum balance model, a bulk plasma model, a collisionless nonlinear numerical sheath model, and an ion Monte-Carlo collision (MCC) model is developed to study the effects of low-frequency (LF) voltage VL on the nonlinear standing wave excitation, plasma uniformity, and ion energy and angular distribution functions (IEDFs and IADFs) in dual-frequency (DF) asymmetric capacitive argon discharges at relatively low pressure of 3 Pa. The plasma diffusion in the radial direction and ion dynamics within the LF oscillating sheath are self-consistently considered. The LF voltage VL at 2 MHz varies from 0 to 700 V while the high-frequency (HF) voltage VH at 60 MHz is fixed at 100 V. Simulation results indicate that without the addition of an LF source (i.e. VL = 0 V), there are a considerable number of high-order harmonics with short wavelengths, leading to significant SWE and central peak in the radial plasma density profile. Nevertheless, the high-order harmonic excitations tend to be weakened and merely occur around the phase of the full LF sheath collapse due to a shorter characteristic damping time of the surface waves as VL increases. This, combined with increased surface wavelengths of both the driving frequency and the higher harmonics at a higher VL, leads to suppressed standing waves and improved plasma uniformity. Meanwhile, the simulations show that both the low and the high energy peaks of IEDF move towards higher energies, and the energy peak separation width ΔE becomes wider with the increase of VL. The IEDF at the radial center of the powered electrode exhibits a broader ΔE than that at the edge. For the IADF, an increased VL results in more ions incident on the electrode with a smaller deflection angle. Because of a thinner sheath and a higher sheath voltage at the electrode center, the peak value of IADF at the electrode center is greater than that at the edge.

Effect of plasma on the intrapulse distortion of linear frequency modulated pulse

Intra-pulse Modulation of the Linear Frequency Modulated Pulse Caused by Time-Varying Plasma

Experimental Study of the Electric Pulse-Width Effect on the Acoustic Pulse of a Plasma Sparker

Effects of Plasma Sheath on Parameter Estimations of Linear Frequency Modulation Pulse Signal

Influence of Plasma Fluctuation on the Electronic Structures and Electron Collisional Excitation and Ionization Processes

On the impact of short laser pulses on cold diluted plasmas

Pulse repetition rate effect on the plasma inside femtosecond laser filament in air

Investigation of pulse plasma reactor discharge characteristics

Effects of Plasma Sheath on the Signal Detection of Narrowband Receiver

Experimental investigation of the electromagnetic effect and improvement of the plasma radial uniformity in a large-area, very-high frequency capacitive argon discharge

Effect of an Electron Plasma Wave on the Propagation of an Ultrashort Laser Pulse

Evaluation of laser-induced plasma distribution

Modified calculation method using FFT filtering and reconstructing of an interferogram for monitoring a laser-plasma density

Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges

Transmission characteristics of millimeter and sub-terahertz channels through spatially ripple plasma sheath layers

Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma

Propagation characteristics of a Gaussian laser beam in plasma with modulated collision frequency

Diagnosing the Ratio of the Electron Density to the Collision Frequency of Plasma Surrounding a Scaled Model in a Shock Tube Using a Low-frequency Alternating Magnetic Field Phase Shift

Research on the Characteristics of Focusing Effect of Electromagnetic Wave in Inhomogeneous Plasma

Editorial: Plasma and related sciences: experimental and theoretical approaches

Research on the Attenuation of Electromagnetic Waves Suppressed by Traveling Magnetic Fields in Plasma