Meta-Fresnel Elements Functioned by Pixelated One Dimensional Gratings with Space-Variant Frequencies and Orientations

Hong Ye,Yu Gu,Shangliang Wu,Yan Ye,Linsen Chen
DOI: https://doi.org/10.1117/12.2515584
2018-01-01
Abstract:By imparting local, space-variant phase changes on an incident electromagnetic wave, metasurfaces are capable of manipulating lights. These surfaces have been constructed from nanometallic optical antennas as well as high-index dielectric antennas. We introduce a unique scalable Fourier transform 4-f system that is applied to lithography. We demonstrate the experimental realization of a flexible Fresnel element, where pixelated one dimensional gratings with space-variant frequencies and orientations are assembled in low-index material as the UV resin on polyethyleneterephthalate (PET) substrate, achieving good concentration performance in the visible spectrum.
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