Abstract:Two-dimensional (2D) van der Waals (vdW) heterostructures have attracted considerable attention in recent years1-5. The most widely used method of fabrication is to stack mechanically exfoliated micrometre-sized flakes6-18, but this process is not scalable for practical applications. Despite thousands of 2D materials being created, using various stacking combinations1-3,19-21, hardly any large 2D superconductors can be stacked intact into vdW heterostructures, greatly restricting the applications for such devices. Here we report a high-to-low temperature strategy for controllably growing stacks of multiple-layered vdW superconductor heterostructure (vdWSH) films at a wafer scale. The number of layers of 2D superconductors in the vdWSHs can be precisely controlled, and we have successfully grown 27 double-block, 15 triple-block, 5 four-block and 3 five-block vdWSH films (where one block represents one 2D material). Morphological, spectroscopic and atomic-scale structural analyses reveal the presence of parallel, clean and atomically sharp vdW interfaces on a large scale, with very little contamination between neighbouring layers. The intact vdW interfaces allow us to achieve proximity-induced superconductivity and superconducting Josephson junctions on a centimetre scale. Our process for making multiple-layered vdWSHs can easily be generalized to other situations involving 2D materials, potentially accelerating the design of next-generation functional devices and applications22-24. Stacks of van der Waals superconductor heterostructures comprising many layers and several blocks of two-dimensional materials have been grown in a highly controllable manner at a wafer scale using a high-to-low temperature strategy.

Movable-Type Transfer and Stacking of Van Der Waals Heterostructures for Spintronics.

Universal transfer and stacking technique of van der Waals heterostructures for spintronics

Stacking-Dependent Interlayer Magnetic Coupling in 2D CrI3/CrGeTe3 Nanostructures for Spintronics

Transfer assembly for two-dimensional van der Waals heterostructures

Van der Waals heterostructures for high-performance device applications: challenges and opportunities

Spin-Dependent Transport at 2D Solids: from Nonmagnetic Layers to Ferromagnetic Van Der Waals Structures.

Van der Waals Magnetic Electrode Transfer for Two-Dimensional Spintronic Devices

Constructing van der Waals heterostructures by dry-transfer assembly for novel optoelectronic device

Stack Growth of Wafer-Scale Van Der Waals Superconductor Heterostructures

The fabrication and physical properties of two-dimensional van der Waals heterostructures

Deterministic and Etching‐Free Transfer of Large‐Scale 2D Layered Materials for Constructing Interlayer Coupled Van Der Waals Heterostructures

Wafer‐scale Vertical Van Der Waals Heterostructures

Stacking transfer of wafer-scale graphene-based van der Waals superlattices

Thickness modulations enable multi-functional spin valves based on Van der Waals hetero-structure

Reliable wafer-scale integration of two-dimensional materials and metal electrodes with van der Waals contacts

2D van der Waals Heterostructures for Emerging Device Applications

Strategy for transferring van der Waals materials and heterostructures

Van der Waals heterostructures for spintronics and opto-spintronics

From Two- to Multi-State Vertical Spin Valves Without Spacer Layer Based on Fe3GeTe2 Van Der Waals Homo-Junctions.

Directional Interlayer Spin-Valley Transfer in Two-Dimensional Heterostructures.

Spin-Driven Ferroelectricity in Two-Dimensional Magnetic Heterostructures