Abstract:Molybdenum disulphide (MoS2) mounted on silicon dioxide (SiO2) constitutes the fundamental functional components of many nanodevices, but its mechanical properties, which are crucial for the device design and fabrication, remain almost unexplored. Here, the mechanical properties of the multilayer MoS2/SiO2 system are investigated via nanoindentation experiments and molecular dynamics simulations. In terms of the mechanical properties, a comparative study of MoS2/SiO2 and graphene/SiO2 systems is presented. The MoS2/SiO2 and graphene/SiO2 systems are found to possess comparable Young's modulus and hardness values, but their mechanical responses and failure modes under indentation are totally different. Interface delamination failure accompanied by ring-like through-thickness cracking is observed in the MoS2/SiO2 system with a relatively thin MoS2 layer, while no interface separation is found in indentation experiments for the graphene/SiO2 system using the same layer thickness. The different failure modes observed between the MoS2/SiO2 and graphene/SiO2 systems can be attributed to the comparable interface adhesion energy but very different bending stiffness values of the MoS2 and graphene components. Specifically, compared with graphene, the larger bending stiffness of MoS2 means that a larger bending force is experienced in the indentation process, overcoming the adhesion of the MoS2/SiO2 interface, which makes interface delamination much easier in the MoS2/SiO2 system.

Nanoscratch on Single-Layer MoS2 Crystal by Atomic Force Microscopy: Semi-Circular to Periodical Zigzag Cracks

Natural Overlaying Behaviors Push the Limit of Planar Cyclic Deformation Performance in Few‐layer MoS2 Nanosheets

In Situ Nanomechanical Characterization of Multi-Layer MoS2 Membranes: from Intraplanar to Interplanar Fracture.

Molecular Dynamics Simulation of Nanocrack Propagation in Single-Layer MoS 2 Nanosheets

Fracture‐induced Nanoscrolls from CVD‐grown Monolayer Molybdenum Disulfide

Fracturing of polycrystalline MoS$_2$ nanofilms

Fracture Mechanics of Multi-Layer Molybdenum Disulfide

Delamination of MoS2/SiO2 Interfaces under Nanoindentation.

On the deformation mechanism of SiC under nano-scratching: An experimental investigation

Orientation-specific Transgranular Fracture Behavior of CVD-grown Monolayer MoS2 Single Crystal

E’’ Raman Mode in Thermal Strain-Fractured CVD-MoS2

Fracture Behaviors of Pre-Cracked Monolayer Molybdenum Disulfide: A Molecular Dynamics Study

Effect of Point Defects and Nanopores on the Fracture Behaviors in Single-Layer MoS2 Nanosheets

A Study of the Subsurface Damaged Layers in Nanoscratching

Brittle Fracture of 2D MoSe2.

In Situ Investigation of Synchronized Dislocation Array Nucleation and Phase Transformation at Mode I-II Cracks of Single-Crystalline Mo

Atomically Sharp Crack Tips in Monolayer MoS2 and Their Enhanced Toughness by Vacancy Defects.

Tensile Loading Induced Phase Transition and Rippling in Single-Layer MoS 2

Controlling and visualizing fracture of 2D crystals by wrinkling

Numerical and experimental investigation on ductile deformation and subsurface defects of monocrystalline silicon during nano-scratching

Molecular Dynamics Simulation of Nanomachining Process and Mechanical Properties of Nanostructure