Abstract:High precision fabrication of nanostructure is a primary limitingfactor to devices miniaturization. Electron beam is expected to promotethe process on the accuracy of fabrication. For instance, electronbeam lithography has been developed to replace optical lithographyto transfer patterns and has produced line width on the order of 10 nmor smaller. Furthermore, electrons can directly interact with thesample to cause changes in structure and properties, which is expectedto be used for fabrication of specialized nanostructures with nanometereven sub-nanometer precision. Transmission electron microscopy (TEM) has become an indispensabletool for the study of the interaction between energetic electronsand sample. A large number of experimental studies have been carriedout inside TEM where electron beam can not only be used for atomicresolution imaging but also for irradiation. These studies are conductiveto understanding phenomena induced by irradiation in essence, whichare the theoretical and experimental basis for controllable manipulationvia electron irradiation. However, TEM images are parallel projectionsof three-dimensional (3D) structures onto the image plane, which tremendouslyincreases the difficulty of atomic-structure analysis. Two-dimensional (2D) layered materials (graphene, hexagon boronnitride, transition metal dichalcogenides and so on) emerged and boomedin the past decade, which provide ideal systems to study electronirradiation effects on matter. As mono- or bi-atomic sheets, theiratomic structures are accessible to image directly with atomic resolutionin the advent of spherical aberration corrected TEM. The lateral resolutionin TEM image, which is smaller than the bond length, leaves almostno room for uncertain interpretation. Meanwhile, the reconstructionof the lattice occurs in the 2D plane can be seen without any projectionartifacts. Besides, structural changes, as they are generated underirradiation with energetic electrons, can be monitored in real time.On this basis, novel mechanisms of lattice reconstruction, which didnot appear in other materials, have been discovered, such as transformationsbetween hexagons and pentagon-heptagon pairs by in-plane 90˚rotation of C–C bonds in graphene sheet. In addition to a detailed understanding of radiation-induced structureevolution and their influence on the properties of 2D sheet, the designof new structures has become feasible. Especially, electron beamsinside modern TEM can be focused onto spots less than 1 A,which allows use of the beam as tweezers to manipulate materials evenat the single atom level. In this way, sub-nanometer quasi one dimensionalstructures, such as nanowires, nanoribbons, nanotubes and atomic chains,have been fabricated in 2D nanosystems. Sub-5 nm nanoporescan also be sculpted in 2D sheets, which is particularly suitablefor chemical and biological molecule detection. Besides, 2D materialscan serve as substrates to study radiation-induced structural evolutionof substance on their surface. This review gives a brief summary of our current knowledge aboutelectron irradiation in the aspect of elastic scattering and inelasticscattering, and a summary of the most recent experimental resultson in situ irradiation in 2D layered material systems,including atomic structural evolution under electron irradiation andcontrollable fabrication of nanostructures by TEM.

Ion Beam Modification of Two-Dimensional Materials: Characterization, Properties, and Applications

Optical Modification of Two-Dimensional Materials: From Atomic to Electronic Scale

Recent research progress in the field of ion beam modification of materials in the Department of Technical Physics at Peking University

In-situ study of electron irradiation on two-dimensional layered materials

Roadmap toward Controlled Ion Beam‐Induced Defects in 2D Materials

Applications of Ion Beam Irradiation in Multifunctional Oxide Thin Films: A Review

Two-dimensional Non-Layered Materials

Laser-aided Processing and Functionalization of 2D Materials

Recent Progress in the Application of Ion Beam Technology in the Modification and Fabrication of Nanostructured Energy Materials

Ion irradiation/implantation induced defect engineering and modification in graphene derivatives-based nanocomposites: Energy storage/conversion and sensor

Ion Beam Induced Surface Modification of Polymer and Application for Engineering

Laser-assisted synthesis and modification of 2D materials

Two-Dimensional Doped Materials

A Discussion on the Application and Production of Metal Ion Beams

Atomic Fabrication of 2D Materials Using Electron Beams Inside an Electron Microscope

Studies on surface modification of materials by intense pulsed ion beams

2D Materials: a Wonderland for Physical Science.

Doping Two-Dimensional Materials: Ultra-Sensitive Sensors, Band Gap Tuning and Ferromagnetic Monolayers

Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics

Beyond electrostatic modification: design and discovery of functional oxide phases via ionic-electronic doping