Abstract:In this paper, a microfluidic sensor based on slow-wave substrate integrated waveguide (SW-SIW) is proposed to measure the complex permittivity of liquids and it achieves an ultrahigh quality factor of 51156, which is much higher than previous reported designs. The proposed sensor consists of three-layer dielectric substrates and an active circuit. The traditional SIW has the fundamental mode of TE101, whose electric field is concentrated inside the SIW structure. The SW-SIW, which is evolved from traditional SIW structure, has the characteristic of relatively small electrical size due to large equivalent capacitance and the capability to confine the electrical field density further. The internal rows of blind via holes are connecting the top layer of second substrate to the bottom layer of third substrate. In order to further reduce the electrical size, an air cavity is formed in second substrate around blind via holes as it can increase the equivalent capacitance of SW-SIW resonator. The air cavity has an important impact on the resonant frequency of the sensor, and the electrical size could be reduced by enlarging the air cavity. In this paper, an appropriate air cavity is adopted with comprehensive consideration of detection sensitivity and electrical size. The polydimethylsiloxane (PDMS) microfluidic substrate is embedded in first substrate. When the resonator is excited, the electric field is confined above the surface of blind vias. The electric field varies with the volume fraction of aqueous solution injected into the microfluidic channel, and the resonant frequency and quality factor alter correspondingly. The variations in the resonant frequency and quality factor are applied to retrieve the complex permittivity of liquid samples. The proposed sensor is fabricated and tested, it has a dimension of 0.678 lambda 0 x 0.432 lambda 0 (lambda 0 is the wavelength in free space at 3.7 GHz), and the peak sensitivity and unloaded quality factor are about 2.5 % and 51156, which are improved by 67 % and 5015 % than traditional SIW sensor, respectively. In particular, the sensitivity of measuring loss tangent of liquid sample is improved by several times to hundreds of times with the loss tangent range from 0.1 to 0.9 than other reported sensors. The measured data has a good agreement with the reference complex permittivity.

A Miniaturized SIW Circular Cavity Resonator for Microfluidic Sensing Applications

Metamaterial Inspired Miniaturized SIW Resonator for Sensor Applications

Differential Microwave Microfluidic Sensor Based on Microstrip Complementary Split-Ring Resonator (MCSRR) Structure

A Metamaterials-Loaded Quarter Mode SIW Microfluidic Sensor for Microliter Liquid Characterization

A Sensitivity-Enhanced Sensor Based on Zeroth-Order Resonance for Liquid Characterization

A Fully Electronically Tunable Millimeter Wave Lab-in-waveguide Nano-Fluidic Sensor

A Design of Metamaterial Inspired Resonator for Multifrequency Fluidic Sensors

A 20-Ghz Microwave Miniaturized Ring Resonator for Nl Microfluidic Sensing Applications

A Novel Substrate Integrated Waveguide Shorted Coaxial Resonator for Characterizing Complex Permittivity of Liquids and Solid Content of Water-based Ferrofluid

Dual-Band Microwave Sensor for Sensing Application of Microfluidic Based on Transmission Line Loaded Pair of SIR Resonators

A Miniaturized Differential Microwave Microfluidic Sensor with High Decoupling

Miniaturized Multiband Planar Sensor Based on Transmission Line Loaded With Pairs of Improved Resonators for Glucose-Aqueous Solution Sensing Applications

High-sensitivity Planar Microfluidic Sensor Based on Zeroth-Order Resonance

Design of OCSRR-Based Differential Microwave Sensor for Microfluidic Applications

Substrate-Integrated- Waveguide Based Microwave Differential Sensor with Additional Zero Point for Measuring Small Variations of Liquids

A High-Sensitivity Microfluidic Sensor Based on a Substrate Integrated Waveguide Re-Entrant Cavity for Complex Permittivity Measurement of Liquids.

Miniaturized Microwave Microfluidic Sensor Based on Quarter-Mode 2.5-D Spoof Plasmons

An Active Microfluidic Sensor Based on Slow-Wave Substrate Integrated Waveguide for Measuring Complex Permittivity of Liquids

Ultrahigh-Sensitivity Microwave Microfluidic Sensors Based on Modified Complementary Electric-LC and Split-Ring Resonator Structures

A Miniaturized and Highly Sensitive Microwave Sensor Based on CSRR for Characterization of Liquid Materials

Real Time Microwave Biochemical Sensor Based on Circular SIW Approach for Aqueous Dielectric Detection