Fabrication of Single‐ and Multilayer MoS2 Film‐Based Field‐Effect Transistors for Sensing NO at Room Temperature
Hai Li, Zongyou Yin, Qiyuan He, Hong Li, Xiao Huang, Gang Lu, Derrick Wen Hui Fam, Alfred Iing Yoong Tok, Qing Zhang, Hua Zhang
2012-01-09
Abstract:Hai Li, Zongyou Yin, Qiyuan He, Hong Li, Xiao Huang, Gang Lu, Derrick Wen Hui Fam, Alfred Iing Yoong Tok, Qing Zhang, and Hua Zhang* highly sensitive, low cost, and portable gas sensors with low power consumption.[2] Electronic gas sensors based on FETs have shown promising results.[2, 4–6, 8, 26, 33–35] One-dimensional semiconductors, such as carbon nanotubes [33–35] and semiconductor nanowires,[36–38] are popular channel materials used for FET-based sensors. 2D graphene sheets are also favored in electronic sensing because of their unique electronic properties and large specific surface area.[1–8] In addition, the 2D configuration of graphene sheets, compared to 1D semiconductors, allows for the better adsorption of gas molecules and leads to lower electrical noise and lower detection limits.[2, 4–6, 26] As a result, the graphene-based gas sensor has achieved a sensitivity down to the …