Abstract:Simultaneous dual-wavelength interferometry (SDWI) could extend the measured range of each single-wavelength interferometry. The moire fringe generated in SDWI indirectly represents the information of the measured long synthetic-wavelength (lambda(S)) phase, thus the phase demodulation is rather arduous. To address this issue, we present a method to convert the moire fringe pattern into a synthetic-wavelength interferogram (moire to synthetic-wavelength, MTS). After the square of the moire fringe pattern in the MTS method, the additive moire pattern is turned into a multiplicative one. And the synthetic-wavelength interferogram could be obtained by a low-pass filtering in spectrum of the multiplicative moire fringe pattern. Therefore, when the dual-wavelength interferometer is implemented with the pi/2 phase shift at lambda(S), a sequence of synthetic-wavelength phase-shift interferograms with pi/2 phase shift could be obtained after the MTS method processing on the captured moire fringe patterns. And then the synthetic-wavelength phase could be retrieved by the conventional phase-shift algorithm. Compared with other methods in SDWI, the proposed MTS approach could reduce the restriction of the phase shift and frame numbers for the adoption of the conventional phase-shift algorithm. Following, numerical simulations are executed to evaluate the performance of the MTS method in processing time, frames of interferograms and the phase shift error compensation. And the necessary linear carrier for MTS method is less than 0.11 times of the traditional dual-wavelength spatial-domain Fourier transform method. Finally, the deviations for MTS method in experiment are 0.97% for a step with the height of 7.8 mu m and 1.11% for a Fresnel lens with the step height of 6.2328 mu m.

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