Fano Resonance in Deuterated Silicon Nitride Based on Fabry-Perot Cavity Coupled Microring Resonator

Zihan Xu,Zeru Wu,Yujie Chen,Shuailong Zhang,Lin Liu,Lidan Zhou,Chunchuan Yang,Yanfeng Zhang,Siyuan Yu
2019-01-01
Abstract:We demonstrate Fano resonance in shallow-etching grating-based Fabry-Perot (FP) cavity coupled microring resonator on a deuterated silicon nitride platform. The measured maximal slope rate (SR) of single Fano resonance is 1542.2 dB/nm. The results are important for many different photonics applications.
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