Synthesis of Two-Dimensional Transition Metal Dichalcogenides with Chemical Vapor Deposition

Xu Guanchen,Lu Zhixing,Zhang Qi,Qiu Hailong,Jiao Liying

DOI: https://doi.org/10.6023/a15030203

2015-01-01

Acta Chimica Sinica

Abstract:Two-dimensional atomic crystals have recently drawn intense attentions due to their unique 2D planar structure, novel properties and attractive applications. In this review, we summarized the recent advances on the synthesis of 2D transition metal dichalcogenides (TMDCs) by chemical vapor deposition (CVD) with the emphasis on 2D MoS2 and WS2. We discussed the effects of various growth parameters on the synthesis of 2D MoS2 and WS2. We also covered the synthesis strategies for the growth of binary alloys and heterostructures based on MoX2 and WX2 (X=S, Se). Finally, we discussed the challenges and opportunities for the CVD growth of 2D TMDCs.