Abstract:Nanophotonics is an emerging research field that deals with interaction between light and matter in a sub-micron length scale. Nanophotonic devices have found an increasing number of applications in many areas including optical communication, microscopy, sensing, and solar energy harvesting especially during the past two decades. Among all nanophotonic devices, three main areas, namely photonic crystals, optical metamaterials and plasmonic devices, gain dominant interest in the photonic society owning to their potential impacts. This thesis studies the fabrication and characterization of three types of novel devices within the above-mentioned areas. They are respectively photonic-crystal (PhC) surface-mode microcavities, optical metamaterial absorbers, and plasmonic couplers. The devices are fabricated with modern lithography-based techniques in a clean room environment. This thesis particularly describes the critical electron-beam lithography step in detail; the relevant obstacles and corresponding solutions are addressed. Device characterizations mainly rely on two techniques: a vertical fiber coupling system and a home-made optical transmissivity/reflectivity setup. The vertical fiber coupling system is used for characterizing on-chip devices intended for photonic integrations, such as PhC surface-mode cavities and plasmonic couplers. The transmissivity/reflectivity setup is used for measuring the absorbance of metamaterial absorbers. This thesis presents mainly three nanophotonic devices, from fabrication to characterization. First, a PhC surface-mode cavity on a SOI structure is demonstrated. Through a side-coupling scheme, a system quality-factor of 6200 and an intrinsic quality-factor of 13400 are achieved. Such a cavity can be used as ultra-compact optical filter, bio-sensor and etc. Second, an ultra-thin, wide-angle metamaterial absorber at optical frequencies is realized. Experimental results show a maximum absorption peak of 88% at the wavelength of ~1.58μm. The ultra-fast photothermal effect possessed by such noble-metal-based nanostructure can potentially be exploited for making better solar cells. Finally, we fabricated an efficient coupler that channels light from a conventional dielectric waveguide to a subwavelength plasmonic waveguides and vice versa. Such couplers can combine low-loss dielectric waveguides and lossy plasmonic components onto one single chip, making best use of the two.

Flash Ablation of Tunable and Deep-Subwavelength Nanogap by Using a Spatially Modulated Femtosecond Laser Pulse for Plasmonic Application

Plasmonic Gold Trimers and Dimers with Air-Filled Nanogaps

Controllable Formation of Nanogaps in Thin Metallic Film by Rear Side Irradiation with Ultrashort Pulsed Laser

Boosting a Sub-10 Nm Nanogap Array by Plasmon-Triggered Waveguide Resonance

Fabrication of Nanogap Structures Through Spatially Shaped Femtosecond Laser Modification with the Assistance of Wet Chemical Etching.

Gold Nanoparticle Transfer Through Photothermal Effects in A Metamaterial Absorber by Nanosecond Laser

Plasmonic Nanogaps: From Fabrications to Optical Applications

Ultra-Dense Plasmonic Nanogap Arrays for Reorientable Molecular Fluorescence Enhancement and Spectrum Reshaping

Laser patterning of conductive gold micronanostructures from nanodots.

Customization of Nanogap Arrays Using Stereolithography and Nanoskiving for Surface-Enhanced Raman Scattering

Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition

High-Throughput Fabrication of Ultradense Annular Nanogap Arrays for Plasmon-Enhanced Spectroscopy

Photothermal Fusion of Gold Nanoparticles in a Plasmonic Metamaterial

Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces

Survey of plasmonic gaps tuned at sub-nanometer scale in self-assembled arrays

Formation of Highly Tunable Periodic Plasmonic Structures on Gold Films Using Direct Laser Writing

Integrating Sub-3 Nm Plasmonic Gaps into Solid-State Nanopores

Probing the Mechanisms of Strong Fluorescence Enhancement in Plasmonic Nanogaps with Sub-nanometer Precision

A Planar Plasmonic Nano-Gap and Its Array for Enhancing Light-Matter Interactions at the Nanoscale.

3D Zig-Zag Nanogaps Based on Nanoskiving for Plasmonic Nanofocusing.