Fabrication And Bending Displacement Characteristics Of Functionally Graded Pzt/Pt Piezoelectric Actuators

K Takagi,JF Li,S Yokoyama,R Watanabe
2001-01-01
Abstract:FGM piezoelectric bimorphic actuators in which composition is graded through the thickness from PZT to K PZT/Pt FGM, has been developed. Using the measured values for compositional dependence of the elastic and piezoelectric properties in the PZT/Pt FGM, FEM analysis was conducted to determine the optimum FGM compositional profile did will show the maximum bending displacement The miniature bimorph-type FGM actuators dig consist of a composite internal-electrode (70%PZT / 30vol%Pt) and three FGM piezoelectric layers (PZT/0 to 20vol%Pt) were fabricated by press and sinter method. The bending displacement characteristics of the actuators were measured using strain gages techniques, in which strain gages were mounted on the top and bottom surfaces of the actuators. The bending displacement increases as increase in the FGM distribution exponent m. Under an electric field of 5kV/m, the actuator with the optimal FGM composition profile exhibited a large bending displacement as large as 3.0 mum.
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