Error Analysis of Sub-Aperture Synthesis for Detecting Surface Defects of Optical Components
刘旭,杨甬英,刘东,陆春华,肖冰,李凌丰,翁俊淼,王琳,杨李茗,李瑞洁
DOI: https://doi.org/10.3321/j.issn:1005-0086.2008.08.022
2008-01-01
Abstract:In order to detect the flaws of large aperture optical components more efficiently and accurately,the paper proposes an optic micro-scattering-imaging detecting system which can recognize defects with micron size.The order of object view field for single aperture is only several millimeters,therefore,in order to examine defects of large aperture optical components,twodimension scanning stage is demanded to image the sub-apertures,and all the sub-apertures should be stitched.When scanning,the error of sub-aperture arrays which is induced by the error of institution would result in the mismatching of pixels at the stitching place,and even the failure of stitching,thus,it would affect the evaluation of defects detecting.Therefore,to make sure the successful synthesis of sub-apertures,this paper carried on analysis to the error which can significantly affect the correct stitching of sub-aperture,and figure out how to reduce the stitching error.