Surface Scratch Detection System Based on Differential Interference Contrast (DIC)

Zhongchao Liang,Yan Li
DOI: https://doi.org/10.1117/12.2550231
2020-01-01
Abstract:In this paper, we provide a high-speed large-field DIC imaging method and corresponding system with sufficient scanning efficiency for real industry, which makes it applicable for in-line surface scratch detection of cellphone panel. The work mainly involves: 1. basic principles of traditional DIC methods and the line-scan improving scheme for high-speed large-field imaging: 2. key techniques of system integration such as motion control and data synchronized acquisition.
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